RSE

Accurion RSE

Referenced Spectroscopic Ellipsometry Fast Inspection of Thin Films and Surfaces

RSE is a special type of ellipsometer which compares the sample to a reference. This way the ellipsometric difference between sample and reference can be measured. Due to the orientation of the reference none of the optical components needs to be moved or modulated during measurement and the full high-resolution spectrum can be obtained in a single-shot measurement. In this way, 200 spectra per second are acquired. The synchronized x-y stage enables the acquisition of large-area film thickness maps in a few minutes.

Your Fast Wafer Inspection

RSE combines the high sensitivity of an ellipsometer with the measurement speed of a reflectometer. In comparison to a laser ellipsometer it includes the spectroscopic information between 450 and 900 nm. This is important in the event that more than one parameter of the processed layer is variable like for example thickness and optical density. Basically referenced methods are more sensitive than absolute methods. Therefore, the RSE method is superior to conventional ellipsometry when very thin layers are in focus. The advantage of increased sensitivity to thin films is even more evident when compared to reflectometry.

Key Features

“Single shot“ Referenced Spectroscopic Ellipsometric Measurements

Due to the orientation of the reference none of the optical components needs to be moved or modulated during measurement and the full high-resolution spectrum can be obtained in a single-shot measurement. In this way, 200 spectra per second are acquired.

Live Data Processing for Evaluation of Film Thicknesses

Accurion's RSE enhances thin film analysis with fast, referenced spectroscopic ellipsometry, offering live data visualization and on-the-spot fitting via LUT. Its capacity for live-evaluation during measurement ensures swift and precise film-thickness mapping for effective surface inspection.

Wide Measurement Range

The Accurion RSE boasts a meticulous 50 x 100 µm micro spot at an AOI of 60°, perfect for capturing fine details on a variety of surfaces. It excels in measuring film thicknesses from less than 1 nm up to 10 µm, accommodating a wide spectrum of material studies. Furthermore, with a spectral range of 450 to 900 nm, the RSE ensures comprehensive analysis across diverse applications.

Various Unique Features

Control and modeling software including Recipe Manager, ROI editor, and Image Viewer for easy access to all measurement and model parameters.

Applications

Perfect for Diverse Applications