NX20-300mm

Park NX20 300mm

The premier choice for large-sample AFM inspection

Park NX20 300mm is the premier choice for large-sample AFM inspection, specifically tailored for failure analysis, quality assurance, and quality control of semiconductor applications. With a motorized traveling range of 300 mm x 300 mm, it sets a new industry standard. This innovative system eliminates the need for cumbersome sample displacement, allowing efficient inspection of entire 300 mm wafers. For FA, QA, and QC engineers working with large samples, the Park NX20 300mm represents an unparalleled gateway to excellence in AFM inspection and analysis of semiconductor wafers.

Specifically Built for Large Sample Wafer Inspection

Reliable and repeatable measurements across the entire 300 mm x 300 mm area

NX20 300mm was designed from the ground up to allow for optimal measurements of large samples. The entire 300 mm wafer area can be analyzed for low-noise AFM measurements. This opens up a whole new scope of measurement automation, allowing engineers to work faster, more simply, and with greater precision.

Park NX20 is equipped with our SmartScan Operating Software, making it one of the easiest-to-use AFMs on the market. With an intuitive but extremely powerful interface, even untrained users can quickly scan a large sample without supervision. This lets senior engineers focus their experience on solving bigger problems and developing better solutions.

NX20 300mm provides recipe-automated AFM measurement for numerous applications providing advanced measurements and analysis of samples at the nanoscale. With the ability to measure roughness, height and depth, perform defect reviews, electrical and magnetic failure analyses, thermal property characterization, and nanomechanical property imaging, the AFM is ideally suited to a wide range of tasks performed by FA, QA, and QC engineers that work with large samples.

NX20 is already the best choice for FA, QA, and QC engineers that need its unparalleled ease of use and automation without compromising on accuracy. With its enlarged platform that supports a 300 mm motorized XY stage, the NX20 300mm takes this a step further, allowing users to inspect larger samples easily and with extremely high accuracy.

Key Features

Unparalleled accuracy and high-resolution imaging with industry-leading low-noise

Park NX20 produces data you can trust, replicate, and publish at the highest nano resolution. It is equipped with the most effective low-noise Z detectors in the field, with a noise of 0.02 nm over a large bandwidth. This produces highly accurate sample topography and no edge overshoot. Just one of the many ways Park NX20 saves you time and gives you better data.

Comprehensive range of AFM modes for Diverse Large Sample Applications

Park NX20 is meticulously crafted to address the demands of diverse metrology and analysis applications for large samples. It stands out with its comprehensive range of modes, presenting an extensive toolkit for researchers across various fields. From standard imaging to electrochemical analysis, the instrument seamlessly supports a multitude of AFM modes, showcasing its adaptability to a wide array of applications. With Park NX20, researchers can confidently explore and delve into their scientific inquiries, benefiting from a versatile and reliable tool that enhances the precision and efficiency of their work.

Flexible Open-Access, Customizable for Cooperating with Various Research Environments

Park NX20 allows users to effortlessly tailor settings for their unique research environments, by offering a diverse range of options and accessories that make it seamlessly adapt to them: optimized options for thermal and chemical properties, etc.

Applications

Perfect for Diverse Applications