NX-Hivac

Park NX-Hivac

High vacuum AFM for failure analysis and ​atmosphere-sensitive materials research

Park NX-Hivac is a high vacuum AFM ideal for precise semiconductor failure analysis and sensitive materials research. Operating in a high vacuum environment, it delivers enhanced accuracy and repeatability, minimizing tip and sample damage. It's the key to a range of applications, including dopant concentration assessment using Scanning Spreading Resistance Microscopy (SSRM). With Park Systems’s intuitive Hivac Manager and automatic vacuum control, Park NX-Hivac streamlines the vacuum process and offers rapid vacuum conditions. Park NX-Hivac offers high-precision research in an oxygen-free vacuum environment.

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High-vacuum AFM for Failure Analysis and atmosphere-sensitive materials research

Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability​ of their ​AFM ​measurements through high vacuum ​environment. Because high vacuum ​measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide​r​ range of signal response​ in various failure analysis applications​​, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

Performing SSRM measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.

Park Hivac Manager: NX-Hivac auto vacuum control High vacuum is controlled by Hivac Manager, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you do not need to worry about the sequence of vacuum operation after clicking on a button. Faster and easier vacuum control software brings you ease of use AFM operation and better productivity.